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Items |
Standard |
Standard |
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Poly-type |
4H |
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Surface |
(0001) Si-face |
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Off-orientation |
4deg-off [11-20] |
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Conductivity |
n-type |
p-type |
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Dopant |
Nitrogen |
Aluminum |
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Carrier Concentration |
Range |
1E14 ~ 5E15cm-3 |
2E14 ~ 5E17cm-3 |
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|
Tolerance |
±15% |
±25% |
|
|
Uniformity(s/mean) |
≤6% |
≤15% |
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Epi thickness |
Range |
20 ~ 200 μm |
20 ~ 200 μm |
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|
Tolerance |
± 6 % |
± 6 % |
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|
Uniformity(s/mean) |
≤ 2% |
≤ 2% |
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Surface defect |
≤1 cm-2 |
≤ 1 cm-2 |
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|
Surface roughness |
≤ 1 nm |
≤ 2 nm |
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Notes:
Measure points for Thickness and Carrier Concentration . Generally, the test method concludes 9 points (as shown in the figure), also the customer can assign the test method.
Ⅰ Carrier Concentration by Hg-CV.
Ⅱ Thickness by FTIR.
Ⅲ Surface defects include downfall, triangles, carrots, particles.
Ⅳ The roughness is tested by AFM,the scan size is 10×10μm2
Ⅴ Better products can be customized.