The epiwafers used in SBD devices are already in the stage of large-scale chip supply
Epitaxial thickness deviation<3.0%
The deviation of carrier concentration within the epitaxial plane is less than 5.0%
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Project |
Specification |
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Particle |
1) >0.3μm,less than 1000 pcs/6 inch wafer 2) >10μm,less than 100 pcs/6 inch wafer 3) >0.3μm,less than 500 pcs/4 inch wafer 4) >10μm,less than 50 pcs/4 inch wafer |
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Metal contamination |
Positive ion：< 8E11 atoms/cm2 Negative ion： < 5E11 atoms/cm2 |
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Capacity |
6 inch wafer：more than 24 pcs per day 4 inch wafer：more than 72 pcs per day |