Technical parameters:

1、Confocal system：Spot size 10um、Resolution 10nm

2、Detection range：Thickness 200~1500um、Warp 0~200μm、Bow -200μm~200μm、TTV 0~200μm、LTV 0~200 μm

3、OCR code reading function：accuracy>99%

4、scanning speed（6-inch）:<3.5 minutes/piece (map scanning with 2mm spacing for acquisition)

5、Repeatability: Thickness±0.1μm，Warp±0.5μm，Bow±0.3μm，TTV±0.5μm，LTV±0.2μm

6、Movement stroke of platform：X=205mm，Y=205mm，Z=50mm

Please contact Manager Wu from the sales department for more details (phone number:18565968707)