Technical parameters:

1、DIC Lens:532 nm-band light source

2、DF Lens:457nm-band light source

3、PL Lens:313-band light source

4、PLX Lens:355-band light source

5、Automatic focusing measurement range:±1.5mm

6、XYZ Platform: moving range 550*400*5(XYZ), repeatability accuracy 0.1um,measurement accuracy:±0.5 μm

7、Repeatability：CV≤5%

8、Detecting accuracy of kill defects:≥95%